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Products

Electronic Grade Hydrofluoride Acid

quality standard:HG/T 4509-2013

Molecular FormulaHF                          Molecular Weight20.01

Item

Index

EI

UP

UP-S

UP-SS

HF w/%  

49.0±0.5

49.0±0.5

49.0±0.2

49.0±0.2

H2SiF6 w/(mg/kg) ≤

50

50

30

30

CL w/(mg/kg) ≤

5

5

0.2

0.05

NO3 w/(mg/kg) ≤

3

3

0.1

0.05

PO4  w/(mg/kg) ≤

1

1

0.1

0.05

SO4   w/(mg/kg) ≤

5

5

0.2

0.05

AL  w/(μg/kg)  ≤

100

10

1

0.1

As  w/(μg/kg)  ≤

200

10

1

0.1

B w/(μg/kg) ≤

100

10

1

0.1

BA w/(μg/kg)  ≤

100

10

1

0.1

CA  w/(μg/kg) ≤

100

10

1

0.1

CD  w/(μg/kg) ≤

50

10

1

0.1

CR  w/(μg/kg) ≤

20

10

1

0.1

CU w/(μg/kg) ≤

20

10

1

0.1

FE w/(μg/kg) ≤

100

10

1

0.1

K w/(μg/kg) ≤

100

10

1

0.1

LI    w/(μg/kg) ≤

20

10

1

0.1

MG  w/(μg/kg) ≤

100

10

1

0.1

MN w/(μg/kg) ≤

50

10

1

0.1

NA  w/(μg/kg)  ≤

100

10

1

0.1

NI  w/(μg/kg) ≤

50

10

1

0.1

PB w/(μg/kg) ≤

50

10

1

0.1

TI  w/(μg/kg) ≤

100

10

1

0.1

SB w/(μg/kg) ≤

50

10

1

0.1

SN  w/(μg/kg) ≤

20

10

1

0.1

ZN w/(μg/kg) ≤

50

10

1

0.1

Particle

(≥1.0μm)/(p/mL) ≤

25

-

-

-

(≥0.5μm)/(p/mL) ≤

-

25

5

-

(≥0.2μm)/(p/mL) ≤

-

-

-

20

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